ASML Part List
| System OEM | System Model | OEM System Part Number | OEM Sub-Assembly | OEM Sub-Assembly Model | OEM Sub-Assembly Part Number | Part Name |
|---|---|---|---|---|---|---|
| ASML | PAS 2500 | 4022.431.3185.1 | Carl Zeiss | Integrator Fly's Eye | 106524-8007/718 | Integrator Fly's Eye |
| ASML | PAS 5500 | 4022.454.71615 | HP/Agilent | HP5517D | C19 | |
| ASML | PAS 5500 | 4022.454.7183 | HP/Agilent | HP5517D | C01 | |
| ASML | PAS 5500 | 4022.454.2603.2 | WG 305 Filter | |||
| ASML | PAS 5500 | 4022.454.73871 | Gradient Filter 365.5nm | |||
| ASML | PAS 5500 | 4022.456.00752 | ARFS03 BXPLens A 1100 (193nm) | |||
| ASML | PAS 5500 | 4022.456.00762 | ARFS03 BXPLens B 1100 (193nm) | |||
| ASML | PAS 5500 | 4022.456.00772 | ARFS03 BXPLens C 1100 (193nm) | |||
| ASML | PAS 5500 | 4022.454.7394.1 Included: 4022.454.67511 |
Carl Zeiss | 116539-8501/321 Included: 116539-0003.020/376 |
Blocking Filter Assy | |
| ASML | PAS 5500 | SERV.502.27023 4022.455.1663 |
JDS Uniphase | Off-Axis Red Laser | Off-Axis Red Laser | |
| ASML | PAS 5500 | SERV.455.09864 | JDS Uniphase | Off-Axis Green Laser (gold and silver controller) | Off-Axis Green Laser | |
| ASML | PAS 5500 | 4022.454.73871 | ||||
| ASML | PAS 5500 | 4022.454.3311.1 | Interference Filter | |||
| ASML | PAS 5500 | SERV.454.48131 | A Beam Expander | |||
| ASML | PAS 5500 | SERV.454.48121 | B Beam Expander | |||
| ASML | PAS 5500 | SERV.454.48111 | C Beam Expander | |||
| ASML | PAS 5500 | SERV.454.48131 | A Beam Expander | |||
| ASML | PAS 5500 | SERV.454.48121 | B Beam Expander | |||
| ASML | PAS 5500 | SERV.454.48111 | C Beam Expander | |||
| ASML | PAS 5500 | SERV.454.54371 | Entrance Window BMU | |||
| ASML | PAS 5500 | 4022.435.6771.1 | Block Filter 1000W / 1500W | |||
| ASML | PAS 5500 | 4022.455.52561 | Bandpass Filter 248nm | |||
| ASML | PAS 5500 | 4022.456.12101 | BXP Lens A | |||
| ASML | PAS 5500 | 4022.456.12112 | BXP Lens B | |||
| ASML | PAS 5500 | 4022.456.12122 | BXP Lens C | |||
| ASML | PAS 5500 | SERV.456.12101 | BXP Lens A | |||
| ASML | PAS 5500 | SERV.456.12112 | BXP Lens B | |||
| ASML | PAS 5500 | SERV.456.12122 | BXP Lens C | |||
| ASML | AT 1100 | 4022.456.00752 | BXP Lens A | |||
| ASML | AT 1100 | 4022.456.00762 | BXP Lens B | |||
| ASML | AT 1100 | 4022.456.00772 | BXP Lens C | |||
| ASML | XT 1400/1400i/1450G | SERV.486.25383 | CYMER XLA-165 | BXP Lens A | ||
| ASML | XT 1400/1400i/1450G | SERV.486.25393 | CYMER XLA-165 | BXP Lens B | ||
| ASML | XT 1400/1400i/1450G | SERV.486.25403 | CYMER XLA-165 | BXP Lens C | ||
| ASML | PAS 5500 | SERV.454.54832 | BMU Coupling Mirror |