Refurbished Lasers and Optical Components
PacTec 2nd Source provides spares support for refurbished lasers and optical components on micro-photolithography and metrology capital equipment used in manufacturing semiconductor components. Our experience encompasses over 35 years in technical and management support for the maintenance and repair of computer-controlled, electro-mechanical, micro-photolithography, and fluid/gas controlled systems within a high-tech industry.
We began the resale of equipment and spare parts in 1992 and in 2003 we changed our primary emphasis to refurbished lasers and optical filters.
Our primary focus is in support of our customer’s requirements for refurbished lasers and optical components used on semiconductor manufacturing equipment.
PacTec 2nd Source provides a warranty for all lasers and optical filters which have been repaired or refurbished with new tubes.
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Click to see some of the optics and lasers we can supply and refurbish.
Products and Services
Optics
PacTec provides a wide selection of consumable optical components used on micro-photolithography and metrology equipment to support various equipment manufacturers' systems used in the semiconductor industry.
One of our more popular items is the bandpass or interference filter which allows for the transmittance of a narrow range of wavelengths while blocking all others. PacTec can customize the spectral characteristics of an i-line bandpass or interference filter based on your requirements.
PacTec 2nd Source has the capability to produce filters with wavelengths ranging from g-line (436nm) through ArF (193nm). A majority of our inventory involves parts to support i-line (365.5nm) and KrF (248nm) wavelengths for micro-photolithography systems. We also have the ability to provide optical components used on inspection systems operating at varying wavelengths.
Laser Assemblies
PacTec can provide refurbished lasers used on micro-photolithography and metrology equipment. The lasers are repaired or have new tubes installed. Lasers are tested and come with a warranty.
Our refurbished (argon) lasers are used on inspection systems. Some tools within the metrology group also require interferometry lasers (HeNe) for stage positioning.
The micro-photolithography systems contain off-axis and on-axis assemblies for multilayer overlay alignment utilizing both DPSS and HeNe lasers. These micro-photolithography systems also require the use of interferometry (stage or reticle positioning) laser assemblies.
We repair the laser assembly and or replace lasers tubes used on argon gas lasers and HeNe gas lasers. The laser module is also replaced on DPSS (diode pumped solid state) lasers. These rebuilt lasers are used in an assorted range of wavelengths 488nm, 532nm and 633nm. Some of the various laser manufactures we can support are Axsys, HP/Agilent, JDS Uniphase, Melles Griot, Spectra Physics and Zygo.
Parts SUpport
PacTec 2nd Source can also utilize our extensive network to support end-users in the repair or replacement of parts used on equipment to coat, develop, image and inspect the manufacturing process for semiconductor components, solar products and LCD panels.